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| Talus Multi-Stage Vertical Rotary Etcher |
[ TMS-VRE Options ] [ Facilities]
Features
The features of the Vertical Etcher are explained using detailed pictures of each section. The sections are broken down as follows:
- Spray Chamber
- Main Pump Area
- Rinse Plumbing Area
- Transfer Area
- Control Panel
NOTE: Not shown on this features page are the extensive list of process control components and process safety features.
The Spray Chamber has two main sets of spray bars, the mostly horizontal set are feed from the main pumps, the vertical set are feed from the DI water and pressurized air lines. All plumbing is placed at a vertical or slightly off horizontal angle to assure proper drainage between the different cycles.
This picture shows the Base and Acid filling nozzles with mesh splash guards. The work rack drive train is made up of a stainless steel drive shaft and a set of eccentric cams that drives the work rack.
The main pump area contains most components that are used during each etch cycle.
There are two main circulating pumps, the left supplying to the front spray bars, and the right supplying to the rear spray bars. Each supply has a ball valve that can be used as a throttling valve. The glycerin filled gauges display the pressure in each set of spray bars. The conveyor drive motor compartment is also accessed from this area.
Within the main pump area service compartment is the circulation plumbing. The plug immersion heater is contained within this plumbing.
The "dump" ball valve is used for draining the main sump into the secondary sump.
This area contains some of the components used during the rinse cycles. This includes the Rinse water solenoid valve and the Forced Air solenoid valve.
The Transfer Area section of this manual will detail each component in the approximate order in which it would operate during a normal cycle. The next figure depicts the chemical storage area. This figure shows the two Polypropylene chemical storage containers. NOTE: The components and lines are fitted with the proper seals for the requested chemicals at the requested concentrations and should not be exchanged at any time. A specially constructed polypropylene cap with quick-connect fittings allows for a safer exchange of chemicals. There are two chemical return lines and two chemical transfer lines. All of these lines are high pressure Teflon tubing with S.S. braiding.
The above figure shows the chemical transfer pumps. They are pneumatically driven double diaphragm pumps. Each of these pumps transfers the chemical from the storage container to the main sump area.
The figure above shows the inside of the secondary sump. The inlet from the main sump dump valve is shown, as well as the secondary sump drain hole.
The drain of the secondary sump leads to the three components above. These are the chemical return solenoids and the Pneumatic ball valve that opens to house drain.
The figure above shows the return line filters. These are placed before the pumps to assure that contaminants be removed from each of the solutions.
The chemical return pumps are shown in the figure above. The figure below shows the Air Solenoid Valve Stack.
This section details the operator control panel. Most of the machine functions are controlled from this panel. This figure shows the PLC interface keypad, the normal cycle control buttons, the temperature controller, the rotation speed controller, and the process indicator and warning lights.
