Microcoater

The Gyrex Microcoaters are designed to uniformly coat photoresist and other liquids to various planar substrates.

Microcoaters are available in three models:

Model 9	For Substrates up to 9" wide
Model 450	For Substrates up to 16" wide
Model 650	For Substrates up to 24" wide

Gyrex Microcoaters are particularly well suited for coating rectangular substrates, but can accommodate round and other shapes as well. The Microcoater eliminates variation in film thickness at the substrate corners and reduces resist waste which normally occurs with spin or spray coating methods. The Microcoater incorporates the HI-FlLM ^TM technique for optimum thickness, single-pass coatings with minimal trailing edge buildup or resist in holes. Best results are obtained when the Gyrex Microcoater operates in tandem with the RPF Fluid System, consisting of resist container, pump and filter.

Thickness variations can be obtained by adjusting viscosity and/or doctor bar pressure. A pressure gage is used to indicate the relative viscosity at any time.

Coating thicknesses between .8 and 6 microns are possible in a single pass depending on type of roll and resist being used. Coating rolls are quickly and simply interchangeable.

Gyrex precision-cut rolls are available in two configurations, depending upon type of resist and application: “E” type rolls are used for ester-based solvents and “H” type rolls are used for hydrocarbon-based solvents. Serrated rolls are obtainable as follows:

Roll Type	T.P.I.	Cured Coating Thickness Range
E6 + H6	167	0.8-1.5 microns
E8	125	2.0 microns (special for LCD’s)
E10 ± H10	100	1.5-2.5 microns
E16 + H16	63	2-4 microns
E22 + H22	45	3.5-6 microns

The optional RPF Fluid system includes .5 gallon resist and .5 gallon solvent containers, gear pumps, control valve and filter housing with cartridge. In addition to supplying the Microcoater with particle-free coating liquid, it allows for rapid cleaning of the coater without contaminating the photoresist with solvent.